Method of manufacturing thin-film transistor, thin-film transistor substrate, and flat panel display apparatus

ABSTRACT

A method of manufacturing a thin-film transistor includes forming an oxide semiconductor on a substrate, stacking an insulating layer and a metal layer on the substrate to cover the oxide semiconductor, forming a photosensitive pattern on the metal layer, forming a gate electrode by etching the metal layer using the photosensitive pattern as a mask, where a part of the gate electrode overlaps a first oxide semiconductor region of the oxide semiconductor, forming a gate insulating film by partially etching the insulating layer using the photosensitive pattern as a mask, where the gate insulating film includes a first insulating region with a first thickness under the photosensitive pattern and a second insulating region with a second thickness less than the first thickness, and performing plasma processing on the gate insulating film so that a second oxide semiconductor region of the oxide semiconductor under the second insulating region becomes conductive.

CROSS-REFERENCE TO RELATED APPLICATION

This application claims priority under 35 U.S.C. § 119 from, and thebenefit of, Korean Patent Application No. 10-2015-0182791, filed on Dec.21, 2015 in the Korean Intellectual Property Office, the contents ofwhich are herein incorporated by reference in their entirety.

BACKGROUND

1. Field

One or more embodiments are directed to a method of manufacturing athin-film transistor (TFT), a TFT substrate, and a flat panel displayapparatus, and more particularly, to a method of manufacturing a TFTusing an oxide semiconductor, and a TFT substrate and a flat paneldisplay apparatus that include a TFT manufactured using the method.

2. Description of the Related Art

A flat panel display apparatus such as an organic light-emitting diodedisplay apparatus or a liquid-crystal display (LCD) apparatus includesat least one thin-film transistor (TFT), a capacitor, and a wiring linethat connects the at least one TFT and the capacitor to each other. Eachof the at least one TFT includes an active layer that includes a channelregion, a source region, and a drain region, and a gate electrode on thechannel region that is electrically insulated from the active layer by agate insulating layer.

The active layer of the TFT is generally formed of a semiconductormaterial such as amorphous silicon or poly-silicon. When the activelayer is formed of amorphous silicon, a mobility of the TFT is low, andthus a driving circuit may not operate at a high speed. When the activelayer is formed of poly-silicon, although a mobility of the TFT is high,a threshold voltage is non-uniform and an additional compensationcircuit is required. In addition, since a conventional method ofmanufacturing a TFT using low temperature poly-silicon (LTPS) uses anexpensive laser heat treatment, investment and equipment managementcosts are high, particularly for large-sized substrates.

SUMMARY

Additional features will be set forth in part in the description whichfollows and, in part, will be apparent from the description, or may belearned by practice of the presented embodiments.

According to one or more embodiments, a method of manufacturing athin-film transistor (TFT) includes: forming an oxide semiconductorpattern on a substrate; sequentially stacking an insulating materiallayer and a metal layer on the substrate that covers the oxidesemiconductor pattern; forming a photosensitive pattern on the metallayer; forming a gate electrode by etching the metal layer using thephotosensitive pattern as a mask, where at least one part of the gateelectrode overlaps a first oxide semiconductor region of the oxidesemiconductor pattern; forming a gate insulating film by partiallyetching the insulating material layer using the photosensitive patternas a mask, where the gate insulating film includes a first insulatingregion with a first thickness under the photosensitive pattern and asecond insulating region with a second thickness less than the firstthickness; and performing plasma processing on the gate insulating filmwhere a second oxide semiconductor region of the oxide semiconductorpattern under the second insulating region becomes conductive.

The plasma processing uses a hydrogen-containing gas.

The second thickness may range from about 500 Å to about 1000 Å.

The method may further include: removing the photosensitive pattern;forming an interlayer insulating film on the gate electrode and the gateinsulating film; forming a contact hole through which a part of thesecond oxide semiconductor region is exposed, by etching the gateinsulating film and the interlayer insulating film; and forming anelectrode through the contact hole that is electrically connected to theexposed part of the second oxide semiconductor region.

Forming the gate electrode may include wet etching the metal layer usingthe photosensitive pattern as a mask, where a side surface of the gateelectrode is disposed inward from a side surface of the photosensitivepattern.

Forming the gate insulating film may include partially dry etching theinsulating material layer by using the photosensitive pattern as a mask,where an edge of the photosensitive pattern corresponds to a boundarybetween the first and second insulating regions.

The first insulating region may include a central portion covered by thegate electrode and an edge portion not covered by the gate electrode.

Performing the plasma processing may include: removing thephotosensitive pattern; and performing plasma processing using the gateelectrode as a mask to form the oxide semiconductor pattern, includingthe first oxide semiconductor region under the central portion of thefirst insulating region, a third oxide semiconductor region under theedge portion of the first insulating region, and the conductive secondoxide semiconductor region under the second insulating region, whereinthe third semiconductor region has a resistance less than a resistanceof the first oxide semiconductor region and greater than a resistance ofthe second oxide semiconductor region.

According to one or more embodiments, a thin-film transistor (TFT)substrate includes: a substrate; an oxide semiconductor pattern disposedon the substrate and that includes a semiconducting first oxidesemiconductor region and a conductive second oxide semiconductor region;a gate insulating film disposed on the substrate that covers the oxidesemiconductor pattern and that includes a first insulating region with afirst thickness and a second insulating region with a second thicknessless than the first thickness; a gate electrode disposed on the firstinsulating region, where at least a part of the gate electrode overlapsthe first oxide semiconductor region; and an interlayer insulating filmdisposed on the gate insulating film that cover the gate electrode,where the second oxide semiconductor region became conductive from ahydrogen gas based plasma process performed on the gate electrode andgate insulating film

The TFT substrate may further include an electrode disposed on theinterlayer insulating film that is electrically connected to the secondoxide semiconductor region through a contact plug that penetrates theinterlayer insulating film and the gate insulating film.

The second thickness may range from about 500 Å to about 1000 Å.

The first insulating region may include a central portion covered by thegate electrode and an edge portion not covered by the gate electrode.

The oxide semiconductor pattern may include a third oxide semiconductorregion disposed between the first and second oxide semiconductor regionsand that has a resistance less than a resistance of the first oxidesemiconductor region and greater than a resistance of the second oxidesemiconductor region.

According to one or more embodiments, a flat panel display apparatusincludes: a substrate; an oxide semiconductor pattern disposed on thesubstrate and that includes a semiconducting first oxide semiconductorregion and a conductive second oxide semiconductor region; a gateinsulating film disposed on the substrate that covers the oxidesemiconductor pattern and that includes a first insulating region with afirst thickness and a second insulating region with a second thicknessless than the first thickness; a gate electrode disposed on the firstinsulating region, where at least a part of the gate electrode overlapsthe first oxide semiconductor region; an interlayer insulating filmdisposed on the gate insulating film that covers the gate electrode; andan electrode disposed in the interlayer insulating film that iselectrically connected to the second oxide semiconductor region througha contact plug that penetrates the interlayer insulating film and thegate insulating film.

The second oxide semiconductor region may become conductive from ahydrogen gas based plasma process performed on the gate electrode andgate insulating film.

The second thickness may range from about 500 Å to about 1000 Å.

The first insulating region may include a central portion covered by thegate electrode and an edge portion not covered by the gate electrode.

The oxide semiconductor pattern may include a third oxide semiconductorregion disposed between the first and second oxide semiconductor regionsand that has a resistance less than a resistance of the first oxidesemiconductor region and greater than a resistance of the second oxidesemiconductor region.

The flat panel display apparatus may further include: a pixel electrodeelectrically connected to the electrode; a counter electrode that facesthe pixel electrode; and an organic emission layer disposed between thepixel electrode and the counter electrode.

The flat panel display apparatus may further include: a pixel electrodeelectrically connected to the electrode; a counter electrode that facesthe pixel electrode; and a liquid crystal layer disposed between thepixel electrode and the counter electrode.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a cross-sectional view of a thin-film transistor (TFT)substrate according to an embodiment.

FIGS. 2A through 2H are cross-sectional views that sequentiallyillustrate a method of manufacturing a TFT according to an embodiment.

FIG. 3 is a cross-sectional view of a TFT substrate according to anotherembodiment.

FIG. 4 is a cross-sectional view that illustrates a method ofmanufacturing a TFT of FIG. 3.

FIG. 5 is a cross-sectional view of an organic light-emitting diodedisplay apparatus according to an embodiment.

FIG. 6 is a cross-sectional view of a liquid crystal display (LCD)apparatus according to an embodiment.

DETAILED DESCRIPTION

Embodiments of the inventive concept may include various embodiments andmodifications, and embodiments thereof will be illustrated in thedrawings and will be described herein in detail. The features of theinventive concept and methods of achieving the features will bedescribed more fully with reference to the accompanying drawings, inwhich exemplary embodiments of the inventive concept are shown. Theinventive concept may, however, be embodied in many different forms andshould not be construed as being limited to the embodiments set forthherein.

It will be further understood that the terms “comprises” and/or“comprising” used herein specify the presence of stated features orcomponents, but do not preclude the presence or addition of one or moreother features or components.

It will be understood that when a layer, region, or element is referredto as being “formed on”, another layer, region, or element, it can bedirectly or indirectly formed on the other layer, region, or element.

Sizes of elements may be exaggerated for convenience of explanation.

Reference will now be made in detail to exemplary embodiments, examplesof which are illustrated in the accompanying drawings. In the drawings,the same elements may be denoted by the same reference numerals, and arepeated explanation thereof will not be given.

FIG. 1 is a cross-sectional view of a thin-film transistor (TFT)substrate 100 according to an embodiment.

Referring to FIG. 1, a TFT substrate 100 includes a substrate 110, anoxide semiconductor pattern 115, a gate insulating film 120, a gateelectrode 125, an interlayer insulating film 130, and an electrode 135.The oxide semiconductor pattern 115 is disposed on the substrate 110,and includes a first oxide semiconductor region 115 a withsemiconducting properties and a second oxide semiconductor region 115 bwith conductive properties. The gate insulating film 120 is disposed onthe substrate 110 to cover the oxide semiconductor pattern 115. The gateinsulating film 120 includes a first insulating region 120 a with afirst thickness da and a second insulating region 120 b with a secondthickness db that is less than the first thickness da. The gateelectrode 125 is disposed on the first insulating region 120 a, and atleast a part of the gate electrode 125 overlaps the first oxidesemiconductor region 115 a. The interlayer insulating film 130 isdisposed on the gate insulating film 120 to cover the gate electrode125. The electrode 135 is disposed on the interlayer insulating film 130and is electrically connected to the second oxide semiconductor region115 b through a contact plug CP that penetrates the interlayerinsulating film 130. The oxide semiconductor pattern 115 and the gateelectrode 125 may constitute a top gate-type TFT.

The TFT substrate 100 is part of an apparatus that includes at least oneTFT on the substrate 110. The TFT substrate 100 may be a flat paneldisplay apparatus in which pixels that include TFTs are arranged in amatrix. For example, the TFT substrate 100 may be an organiclight-emitting diode display apparatus or a liquid crystal display (LCD)apparatus.

The substrate 110 supports the entire TFT substrate 100 and maintainsthe stiffness of the TFT substrate 100. The substrate 110 may have aflat top surface and may be formed of a transparent insulating material.For example, the substrate 110 can be formed of glass. However,embodiments of the inventive concept are not limited thereto, and thesubstrate 110 may be formed of a plastic material such as polyethyleneterephthalate (PET), polyethylene naphthalate (PEN), polyimide (PI),polyethersulfone (PES), or polyacrylate (PAR). The substrate 110 may beformed of an opaque material such as a metal or a carbon fiber, and torealize a flexible display apparatus, the substrate 110 may be formed ofa flexible plastic material such as a PI film.

In addition, an auxiliary film, such as a barrier film, a blocking film,and/or a buffer film may be disposed on the substrate 110. The auxiliaryfilm planarizes a top surface of the substrate 110 and prevents thepenetration of impurities. The auxiliary film may be formed of aninorganic insulating material, and may have a single-layer structure ora multi-layer structure. The auxiliary film may prevent the oxidesemiconductor pattern 115 that is to be subsequently stacked from beingcontaminated with impurities from the substrate 110, thereby protectingthe oxide semiconductor pattern 115 and improving interfacialproperties.

The oxide semiconductor pattern 115 is disposed on the substrate 110,and includes the first oxide semiconductor region 115 a and the secondoxide semiconductor region 115 b.

The first oxide semiconductor region 115 a has semiconductingproperties, and corresponds to a channel region of each TFT. The firstoxide semiconductor region 115 a overlaps the gate electrode 125.

The second oxide semiconductor region 115 b has conductive properties,and is disposed both sides of the first oxide semiconductor region 115a. The second oxide semiconductor regions 115 b correspond to a sourceregion and a drain region of the TFT. The second oxide semiconductorregion 115 b may also function as a wiring line for electricallyconnecting the TFT to another TFT or another element. The second oxidesemiconductor region 115 b may obtain its conductive properties from aplasma process that uses a hydrogen-containing gas.

According to an embodiment, oxide semiconductor pattern 115 includes anoxide semiconductor material. The oxide semiconductor material mayinclude an oxide of at least one of indium (In), gallium (Ga), stannum(Sn), zirconium (Zr), vanadium (V), hafnium (Hf), cadmium (Cd),germanium (Ge), chromium (Cr), titanium (Ti), and zinc (Zn). Forexample, the oxide semiconductor material may include at least one ofzinc oxide (ZnO), zinc-tin oxide (ZTO), zinc-indium oxide (ZIO), indiumoxide (InO), titanium oxide (TiO), indium-gallium-zinc oxide (IGZO), andindium-zinc-tin oxide (IZTO).

Since a TFT using an oxide semiconductor as an active layer has a highermobility than a TFT using silicon (Si) as an active layer, additionalion doping for increasing mobility is not required. In addition, since aTFT that includes an oxide semiconductor has a polycrystalline andamorphous structure even at room temperature, an additional annealingprocess is not needed and a TFT that includes an oxide semiconductormaterial can be formed using a low-temperature process. In addition,since the active layer can be formed using sputtering, etc., a TFT thatincludes an oxide semiconductor material can be used to manufacture alarge-sized substrate, as material costs may be low.

The gate insulating film 120 is disposed on the substrate 110 to coverthe oxide semiconductor pattern 115. The gate insulating film 120includes the first insulating region 120 a with the first thickness daand the second insulating region 120 b with the second thickness db lessthan the first thickness da.

According to an embodiment, the first insulating region 120 acorresponds to the first oxide semiconductor region 115 a, and the gateelectrode 125 is disposed on the first insulating region 120 a. A part,of the first insulating region 120 a, such as a central portion, iscovered by the gate electrode 125, and a remaining part of the firstinsulating region 120 a, such as an edge portion, is not covered by thegate electrode 125.

According to an embodiment, the second insulating region 120 b has thesecond thickness db and covers the second oxide semiconductor region 115b and a portion of the substrate 110 not covered by the oxidesemiconductor pattern 115.

According to an embodiment, the gate insulating film 120 is formed of asilicon oxide (SiO₂). In this case, the second thickness db of thesecond insulating region 120 b may range from about 500 Å to about 1000Å. However, embodiments of the inventive concept are not limitedthereto, and the gate insulating film 120 may be formed of an insulatingmaterial other than SiO₂, and may have a single-layer structure or amulti-layer structure.

According to an embodiment, the gate insulating film 120 can improve theinterfacial properties of the oxide semiconductor pattern 115 and canprevent impurities from penetrating into the oxide semiconductor pattern115.

According to an embodiment, the gate electrode 125 is disposed on thefirst insulating region 120 a of the gate insulating film 120, and atleast a part of the gate electrode 125 overlaps the first oxidesemiconductor region 115 a. The gate electrode 125 may be formed of ametal and may have a single-layer structure or a multi-layer structure.The gate electrode 125 may be formed by stacking, for example, a copper(Cu) film and titanium (Ti) layer.

According to an embodiment, the interlayer insulating film 130 is formedof an inorganic insulating material and has a single-layer structure ora multi-layer structure. Alternatively, the interlayer insulating film130 may be formed of an organic insulating material using spin coating,etc. In addition, the interlayer insulating film 130 may have amulti-layer structure in which an organic insulating material and aninorganic insulating material are alternately disposed.

According to an embodiment, the interlayer insulating film 130 and thegate insulating film 120 have a contact hole CH through which a portionof the second oxide semiconductor region 115 b of the oxidesemiconductor pattern 115 is exposed.

According to an embodiment, the electrode 135 is disposed on theinterlayer insulating film 130 and is electrically connected to thesecond oxide semiconductor region 115 b through the contact plug CP inthe contact hole CH in the interlayer insulating film 130 and the gateinsulating film 120. The electrode 135 includes a source electrode 135 aand a drain electrode 135 b.

According to an embodiment, the electrode 135 is formed of, for example,a metal, and may have a single-layer structure or a multi-layerstructure.

According to a present embodiment, the gate insulating film 120 includesthe first insulating region 120 a with the first thickness da and thesecond insulating region 120 b with the second thickness db less thanthe first thickness da. The gate insulating film 120 is entirelydisposed between the gate electrode 125 and the second oxidesemiconductor region 115 b.

In a conventional method of making the second oxide semiconductor region115 b of the oxide semiconductor pattern 115 conductive, a part of agate insulating film 120 is removed to expose the second oxidesemiconductor region 115 b. In this case, the gate insulating film isdisposed only between the gate electrode 125 and the first oxidesemiconductor region 115 a, and an interlayer insulating film covers thesecond oxide semiconductor region 115 b. In this case, an interfacebetween the gate insulating film and the interlayer insulating film,which is matched to a boundary between the first and second oxidesemiconductor regions 115 a and 115 b, is formed. In this structure, ifa high voltage is applied between the gate electrode 125 and the secondoxide semiconductor region 115 b, current can leak along the interfacebetween the gate insulating film and the interlayer insulating filmbetween the gate electrode 125 and the second oxide semiconductor region115 b. In addition, since the interface between the gate insulating filmand the interlayer insulating film is structurally weaker than acontinuous insulating film, if a high voltage is applied to the gateelectrode 125, the interface between the gate insulating film and theinterlayer insulating film may be destroyed, thereby causing the TFT tobreak down.

According to embodiments, however, since the gate insulating film 120covers the entire oxide semiconductor pattern 115, current leakagebetween the gate electrode 125 and the second oxide semiconductor region115 b can be prevented. In addition, since the continuously formed gateinsulating film 120 is structurally stronger than an interface betweenthe gate insulating film 120 and the interlayer insulating film 130, thegate insulating film 120 is not easily destroyed, thereby reducing therisk of a TFT breakdown.

In addition, since the second oxide semiconductor region 115 b is madeconductive using plasma processing with a hydrogen-containing gas, thesecond oxide semiconductor region 115 b does not need to be exposed. Forhydrogen to penetrate into the second oxide semiconductor region 115 bthrough plasma processing, the second thickness db of the secondinsulating region 120 b on the second oxide semiconductor region 115 bis less than the first thickness da of the first insulating region 120a. Such a structure can be formed without an additional mask.

FIGS. 2A through 2H are cross-sectional views that sequentiallyillustrate a method of manufacturing a TFT, according to an embodiment.

Referring to FIG. 2A, a first oxide semiconductor pattern 115′ is formedon the substrate 110.

The substrate 110 has a flat top surface and may be formed of atransparent insulating material, such as glass. Alternatively, thesubstrate 110 may be formed of a flexible plastic material such as a PIfilm to realize a flexible display apparatus. Alternatively, thesubstrate 110 may be formed of an opaque material such as a metal or acarbon fiber.

According to an embodiment, to prevent impurities from penetrating fromthe substrate 110 into the first oxide semiconductor pattern 115′ thatis to be subsequently stacked, and thus to protect the first oxidesemiconductor pattern 115′ and improve its interfacial properties, anauxiliary film, such as a barrier film, a blocking film, and/or a bufferfilm, may be disposed on the substrate 110. The auxiliary film may beformed of an insulating oxide such as silicon oxide (SiO_(x)), siliconnitride (SiN_(x)), aluminum oxide (Al₂O₃), hafnium oxide (HfO₃), oryttrium oxide (Y₂O₃) to have a multi-layer structure or a single-layerstructure. The auxiliary film may be formed by any appropriatedeposition method, such as plasma-enhanced chemical vapor deposition(PECVD), atmospheric pressure CVD (APCVD), or low-pressure CVD (LPCVD).

According to an embodiment, the first oxide semiconductor pattern 115′is formed on the substrate 110. An oxide semiconductor layer 115′ isformed on the substrate 110, after which the first oxide semiconductorpattern 115′ is formed using photolithography and etching, as shown inFIG. 2A.

The oxide semiconductor material may include an oxide of at least one ofIn, Ga, Sn, Zr, V, Hf, Cd, Ge, Cr, Ti, and Zn. For example, the oxidesemiconductor material may include at least one of ZnO, ZTO, ZIO, InO,TiO, IGZO, and IZTO. For example, the oxide semiconductor material mayinclude In, Ga, and Zn in an atomic ratio of 2:2:1.

However, embodiments of the inventive concept are not limited thereto,and the oxide semiconductor material may include a quaternary metaloxide such as a In—Sn—Ga—Zn—O-based material, a ternary metal oxide suchas a In—Ga—Zn—O-based material, a In—Sn—Zn—O-based material, aIn—Al—Zn—O-based material, a Sn—Ga—Zn—O-based material, aAl—Ga—Zn—O-based material, a Sn—Al—Zn—O-based material, or aCd—Sn—O-based material, a binary metal oxide such as a In—Zn—O-basedmaterial, a Sn—Zn—O-based material, a Al—Zn—O-based material, aZn—Mg—O-based material, a Sn—Mg—O-based material, or a In—Mg—O-basedmaterial, or a unary metal oxide such as a In—O-based material, aSn—O-based material, a Zn—O-based material, a Ti—O-based material, or aCd—O-based material. A In—Ga—Zn—O-based oxide semiconductor may includeat least In, Ga, and Zn, irrespective of the composition ratio, and mayalso include one or more elements other than In, G, and Zn.

Referring to FIG. 2B, according to an embodiment, a first insulatinglayer 120′ and a first metal layer 125′ are sequentially stacked on thesubstrate 110 to cover the first oxide semiconductor pattern 115′.

According to an embodiment, the first insulating material layer 120′ isdeposited on the substrate 110 on which the first oxide semiconductorpattern 115′ is formed. The first insulating material layer 120′ may beformed of SiO₂. However, embodiments of the inventive concept are notlimited thereto, and the first insulating material layer 120′ may beformed of an inorganic insulating material such as silicon nitride(SiNO, aluminum oxide (Al₂O₃), copper oxide (CuO_(x)), terbium oxide(Tb₄O₇), yttrium oxide (Y₂O₃), niobium oxide (Nb₂O₅), or praseodymiumoxide (Pr₂O₃) in a single-layer structure or a multi-layer structure.The first insulating material layer 120′ may be formed by anyappropriate deposition method, such as PECVD, APCVD, or LPCVD.

According to an embodiment, the first metal material layer 125′ isdeposited on the first insulating material layer 120′. The first metalmaterial layer 125′ is formed of at least one metal material selectedfrom silver (Ag), magnesium (Mg), aluminum (Al), platinum (Pt), lead(Pb), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium(Cr), lithium (Li), calcium (Ca), molybdenum (Mo), titanium (Ti),tungsten (W), and copper (Cu). The first metal material layer 125′ canbe formed by stacking, for example, a Cu film and a Ti film.

Referring to FIG. 2C, according to an embodiment, a photosensitivepattern PR is formed on the first metal material layer 125′.

According to an embodiment, a photosensitive organic material layer isstacked on the first metal material layer 125′, after which thephotosensitive pattern PR can be formed by exposure or development usinga photomask, as shown in FIG. 2C.

Examples of a photosensitive organic material include an olefin-basedorganic material, an acryl-based organic material, and an imide-basedorganic material. For example, the photosensitive organic material mayinclude PI. The photosensitive organic material may be a positivephotosensitive material of which an exposed portion is removed, or anegative photosensitive material of which an exposed portion ishardened.

Referring to FIG. 2D, according to an embodiment, the first metalmaterial layer 125′ is etched using the photosensitive pattern PR as amask. The first metal layer 125′ can be isotropically wet etched usingan etchant. As a result, the gate electrode 125 corresponding to thephotosensitive pattern PR can be formed as shown in FIG. 2D. At least apart of the gate electrode 125 overlaps the first oxide semiconductorregion 115 a of the oxide semiconductor pattern 115 of FIG. 1.

According to an embodiment, the first metal material layer 125′ isetched more than the mask during the wet etching. As a result, a sidesurface of the gate electrode 125 is disposed inward from a side surfaceof the photosensitive pattern PR.

Referring to FIG. 2E, according to an embodiment, the first insulatingmaterial layer 120′ is partially etched using the photosensitive patternPR as a mask. A portion of the first insulating material layer 120′disposed under the photosensitive pattern PR is not etched, and aportion of the first insulating material layer 120′ not covered by thephotosensitive pattern PR is slightly etched. As a result, the firstinsulating region 120 a of the gate insulating film 120 with the firstthickness da is formed under the photosensitive pattern PR along withthe second insulating region 120 b with the second thickness db lessthan the first thickness da.

When the gate insulating film 120 is formed of SiO₂, the secondthickness db of the second insulating region 120 b ranges from about 500Å to about 1000 Å. When the second thickness db is less than or equal to500 Å, the first oxide semiconductor region 115 a of the oxidesemiconductor pattern 115 may become conductive during a subsequenthydrogen gas plasma process. In addition, when the second thickness dbis greater than or equal to 1000 Å, the second oxide semiconductorregion 115 b of the oxide semiconductor pattern 115 may not becomeconductive from the subsequent hydrogen gas plasma process.

According to an embodiment, isotropic dry etching is performed on thefirst insulating material layer 120′ using the photosensitive pattern PRas a mask. Due to the isotropic dry etching, a boundary between thefirst insulating region 120 a and the second insulating region 120 b maycorrespond to an edge of the photosensitive pattern PR. Accordingly, thegate electrode 125 is disposed on a part, that is, a central portion, ofthe first insulating region 120 a and a remaining part, that is, an edgeportion, of the first insulating region 120 a will be exposed.

Referring to FIG. 2F, according to an embodiment, plasma processing isperformed on the structure of FIG. 2E on the substrate 110. The plasmaprocessing may be performed using a hydrogen-containing gas.

As a result, the oxide semiconductor pattern 115 that includes asemiconducting first oxide semiconductor region 115 a and a conductivesecond oxide semiconductor region 115 b is formed.

According to an embodiment, the second oxide semiconductor region 115 bof the oxide semiconductor pattern 115 becomes conductive due to thehydrogen plasma. The oxide semiconductor material of the second oxidesemiconductor region 115 b becomes conductive by being reduced due tothe hydrogen plasma. In this case, since the photosensitive pattern PRfunctions as a mask, the first oxide semiconductor region 115 a disposedunder the first insulating region 120 a does not become conductive dueto the plasma.

The second insulating region 120 b having the relatively small secondthickness db is disposed on the second oxide semiconductor region 115 b,Accordingly, hydrogen can diffuse through the second insulating region120 b during plasma processing into the second oxide semiconductorregion 115 b, and the oxide semiconductor material of the second oxidesemiconductor region 115 b is reduced by reacting with the hydrogen. Forthe oxide semiconductor material to become conductive using plasmaprocessing, the second thickness db should be less than or equal 1000 Å.

If the second thickness db is less than 500 Å, the first oxidesemiconductor region 115 a of the oxide semiconductor pattern 115 a willalso become conductive during the hydrogen plasma processing. As aresult, the entire oxide semiconductor pattern 115 can be madeconductive, thereby causing the TFT to fail to function.

Plasma processing is a process of modifying chemical or physicalproperties of a material's surface allowing high energy plasma particlesto collide with the material's surface. According to an embodiment ofthe inventive concept, a hydrogen-containing gas can be used for plasmaprocessing. The gas may further contain at least one of argon, helium,xenon, nitrogen, nitric oxide, and oxygen, in addition to hydrogen.

Since an oxide semiconductor is reduced by having plasma processingperformed thereon, an oxygen vacancy in the oxide semiconductor isinduced and increased. The increased oxygen vacancy increases a carrierconcentration of the oxide semiconductor material. As a result, theoxide semiconductor material becomes conductive and easily conductselectricity therethrough.

Referring to FIG. 2G, according to an embodiment, the photosensitivepattern PR is removed from the gate electrode 125. The photosensitivepattern PR may be removed by ashing.

Next, according to an embodiment, a second insulating material layer isstacked on the gate insulating film 120 and the gate electrode 125. Thesecond insulating material layer may include an inorganic insulatingmaterial such as SiO₂, SiN_(x), Al₂O₃, CuO_(x), Tb₄O₇, Y₂O₃, Nb₂O₅, orPr₂O₃. The second insulating material may have a single-layer structureor a multi-layer structure. The second insulating material layer may beformed using any appropriate deposition method, such as PECVD, APCVD, orLPCVD.

Alternatively, the second insulating material layer may be formed of atleast one organic insulating material selected from polyimide,polyimide, acrylic resin, benzocyclobutene, and phenolic resin usingspin coating, etc. In addition, the second insulating material layer mayhave a multi-layer structure in which an organic insulating material andan inorganic insulating material are alternately disposed.

Next, according to an embodiment, photolithography and etching areperformed on the the second insulating material layer and gateinsulating film 120, and the interlayer insulating film 130 is formedwith the contact hole CH through which a part of the second oxidesemiconductor region 115 b is exposed.

Referring to FIG. 2H, according to an embodiment, a second metal layer135′, including the contact plug CP that fills the contact hole CH inthe gate insulating film 120 and the interlayer insulating film 130 isstacked on the interlayer insulating film 130. The contact plug CP iselectrically connected to the second oxide semiconductor region 115 b.

The second metal material layer 135′ may be formed of at least one ofAg, Mg, Al, Pt, Pb, Au, Ni, Nd, Ir, Cr, Li, Ca, Mo, Ti, W, and Cu. Thesecond metal material layer 135′ may have a single-layer structure or amulti-layer structure.

Referring to FIG. 1, the electrode 135 is formed that is electricallyconnected to the second oxide semiconductor region 115 b through thecontact plug CP in the contact hole CH, by performing photolithographyand etching on the second metal material layer 135′. The electrode 135includes the source electrode 135 a and the drain electrode 135 b.

FIG. 3 is a cross-sectional view of a TFT substrate 100 a according toanother embodiment.

Referring to FIG. 3, a TFT substrate 100 a includes the substrate 110,an oxide semiconductor pattern 116, the gate insulating film 120, thegate electrode 125, the interlayer insulating film 130, and theelectrode 135.

The TFT substrate 100 a is substantially the same as the TFT substrate100 of FIG. 1 except for the oxide semiconductor pattern 116. A repeatedexplanation of the same elements as those in FIG. 1 will not be given.

The oxide semiconductor pattern 116 includes a first oxide semiconductorregion 116 a, second oxide semiconductor regions 116 b, and third oxidesemiconductor regions 116 c. The first oxide semiconductor region 116 ais disposed between the second oxide semiconductor regions 116 b. Eachthird oxide semiconductor region 116 c is disposed between the firstoxide semiconductor region 116 a and one of the second oxidesemiconductor regions 116 b.

According to an embodiment, resistance of the third oxide semiconductorregion 116 c is less than a resistance of the first oxide semiconductorregion 116 a and greater than a resistance of the second oxidesemiconductor region 116 b. Since the second oxide semiconductor region116 b is conductive, the second oxide semiconductor region 116 b has avery low resistance. Since the first oxide semiconductor region 116 a isa semiconductor, the first oxide semiconductor region 116 a has aresistance between that of a conductor and an insulator. Since the thirdoxide semiconductor region 116 c has a resistance that is less than thatof the first oxide semiconductor region 116 a and greater than that ofthe second oxide semiconductor region 116 b, a strong electric field maybe prevented from forming between the first oxide semiconductor region116 a and the second oxide semiconductor region 116 b. Accordingly, thepossibility that characteristics of the TFT, such as a threshold voltageof the TFT, change due to a strong electric field can be reduced,thereby improving reliability.

As described above, the gate insulating film 120 includes the firstinsulating region 120 a with the first thickness da and the secondinsulating region 120 b with the second thickness db less than the firstthickness da. The gate electrode 125 is disposed on a part of the firstinsulating region 120 a. The first insulating region 120 a includes acentral portion covered by the gate electrode 125 and an edge portionnot covered by the gate electrode 125.

According to an embodiment, the first oxide semiconductor region 116 ais disposed under the central portion of the first insulating region 120a covered by the gate electrode 125. That is, a boundary between thefirst oxide semiconductor region 116 a and the third oxide semiconductorregion 116 c can be defined by the edge of the gate electrode 125.

According to an embodiment, the third oxide semiconductor region 116 cis disposed under the edge portion of the first insulating region 120 anot covered by the gate electrode 125. That is, a boundary between thethird oxide semiconductor region 116 c and the second oxidesemiconductor region 116 b can be defined by a stepped portion of thegate insulating film 120, that is, a boundary between the firstinsulating region 120 a and the second insulating region 120 b.

According to an embodiment, the second oxide semiconductor region 116 bis disposed under the second insulating region 120 b.

FIG. 4 is a cross-sectional view that illustrates a method ofmanufacturing a TFT of FIG. 3.

The TFT of the TFT substrate 100 a can be formed using processes of amethod described with reference to FIGS. 2A through 2E. Next, a processof FIG. 4 can be performed. Next, processes of the method described withreference to FIGS. 2G through 2H can be performed.

First, referring to FIG. 2E, the gate insulating film 120 is formed thatincludes the first insulating region 120 a and the second insulatingregion 120 b, by partially etching the first insulating material layer120′ using the photosensitive pattern PR as a mask.

Referring to FIG. 4, according to an embodiment, the photosensitivepattern PR is removed from the gate electrode 125. The photosensitivepattern PR can be removed by ashing.

According to an embodiment, plasma processing is performed on astructure formed on the substrate 110. The plasma processing can beperformed using a hydrogen-containing gas. As a result, the oxidesemiconductor pattern 116 is formed, including the first oxidesemiconductor region 116 a under a central portion of the firstinsulating region 120 a covered by the gate electrode 125, the thirdoxide semiconductor region 116 c under an edge portion of the firstinsulating region 120 a not covered by the gate electrode 125, and theconducting second oxide semiconductor region 116 c under the secondinsulating region 120 b.

According to an embodiment, the third oxide semiconductor region 116 ccorresponds to the edge portion of the first insulating region 120 a andis disposed between the first oxide semiconductor region 116 a and thesecond oxide semiconductor region 116 b.

According to an embodiment, the second oxide semiconductor region 116 band the third oxide semiconductor region 116 c of the oxidesemiconductor pattern 116 become conductive due to a hydrogen-basedplasma. Oxide semiconductor materials of the second oxide semiconductorregion 116 b and the third oxide semiconductor region 116 c becomeconducting by being reduced by the hydrogen-based plasma. In this case,since the gate electrode 125 functions as a mask, the first oxidesemiconductor region 116 a disposed under the central portion of thefirst insulating region 120 a unaffected by the plasma.

The second insulating region 120 b, which as a relatively small secondthickness db, is disposed on the second oxide semiconductor region 116b. Accordingly, hydrogen can diffuse through the second insulatingregion 120 b during plasma processing into the second oxidesemiconductor region 116 b, and the hydrogen reacts with and reduces theoxide semiconductor material of the second oxide semiconductor region116 b.

The first insulating region 120 a, which has a relatively greater firstthickness da, is disposed on the third oxide semiconductor region 116 c.Accordingly, less hydrogen can diffuse through the first insulatingregion 120 a than that through the second insulating region 120 b. Asmaller amount of hydrogen can diffuse into the third oxidesemiconductor region 116 c than into the second oxide semiconductorregion 116 b. Accordingly, although the third oxide semiconductor region116 c also becomes conductive, since the third oxide semiconductorregion 116 c is less conductive than the second oxide semiconductorregion 116 b, the third oxide semiconductor region 116 c has aresistance greater than that of the second oxide semiconductor region116 b.

Referring back to FIG. 2G, according to an embodiment, the interlayerinsulating film 130, which has the contact hole CH through which a partof the second oxide semiconductor region 116 b is exposed, is formed onthe gate insulating film 120 and the gate electrode 125.

FIG. 5 is a cross-sectional view of an organic light-emitting diodedisplay apparatus 200 according to an embodiment.

Referring to FIG. 5, an organic light-emitting diode display apparatus200 includes a substrate 210, an oxide semiconductor pattern 215, a gateinsulating film 220, a gate electrode 225, an interlayer insulating film230, an electrode 235, a pixel electrode 245, a pixel defining film 250,an organic emission layer 255, and a counter electrode 260.

The oxide semiconductor pattern 215 is disposed on the substrate 210,includes a semiconducting first oxide semiconductor region 215 a and aconductive second oxide semiconductor region 215 b, and corresponds tothe oxide semiconductor pattern 115 of FIG. 1. The oxide semiconductorpattern 215 may be replaced with the oxide semiconductor pattern 116 ofFIG. 3. The gate insulating film 220 is disposed on the substrate 210 tocover the oxide semiconductor pattern 215, includes a first insulatingregion 220 a with a first thickness da and a second insulating region220 b with a second thickness db less than the first thickness da, andcorresponds to the gate insulating film 120 of FIG. 1.

The gate electrode 225 is disposed on the first insulating region 220 a,has at least a part that overlaps the first oxide semiconductor region215 a, and corresponds to the gate electrode 125 of FIG. 1. Theinterlayer insulating film 230 is disposed on the gate insulating film220 to cover the gate electrode 225 and corresponds to the interlayerinsulating film 130 of FIG. 1. The electrode 235 is disposed on theinterlayer insulating film 230, is electrically connected to the secondoxide semiconductor region 220 b through a contact plug CP thatpenetrates the interlayer insulating film 230 and the gate insulatingfilm 220, and corresponds to the electrode 135 of FIG. 1. The electrode235 includes a source electrode 235 a and a drain electrode 235 b.

The substrate 210, the oxide semiconductor pattern 215, the gateinsulating film 220, the gate electrode 225, the interlayer insulatingfilm 230, and the electrode 235 respectively correspond to the substrate110, the oxide semiconductor pattern 115, the gate insulating film 120,the gate electrode 125, the interlayer insulating film 130, and theelectrode 135 of FIGS. 1 and 3, and thus a repeated explanation thereofwill not be given.

According to an embodiment, the organic light-emitting display apparatus200 includes a protective layer 240 that covers the interlayerinsulating film 230 and the electrode 235. The protective layer 240 hasa via-hole VH through which a part of the electrode 235 is exposed. Thevia-hole VH can be formed using photolithography and etching.

The protective layer 240 may be formed of an organic insulating materialselected from polyimide, polyamide, acrylic resin, benzocyclobutene, andphenolic resin using spin coating, etc. According to an embodiment, theprotective layer 240 has a flat top surface, which can prevent defectsof a subsequently formed organic light-emitting diode device.

According to an embodiment, the organic light-emitting diode displayapparatus 200 includes the pixel electrode 245 formed on the protectivelayer 240, the counter electrode 260, and the organic emission layer255. The pixel electrode 245 can be used as an anode of an OLED and thecounter electrode 260 can be used as a cathode of an OLED. However,embodiments of the inventive concept are not limited thereto, and thepixel electrode 245 and the counter electrode 260 may be respectively acathode and an anode.

The OLED can emit light at a luminance corresponding to a drivingcurrent received from the TFT.

According to an embodiment, the pixel electrode 245 is formed on theprotective layer 240 and is electrically connected to the TFT, forexample, the source electrode 235 a, through the via-hole VH in theprotective layer 240. The pixel electrode 245 may be formed of anymaterial suitable for an emission type organic light-emitting displayapparatus 200. For example, when the organic light-emitting displayapparatus 200 is a bottom-emission display apparatus in which an imageis displayed in a direction toward the substrate 210 or a dual-emissiondisplay apparatus in which an image is displayed in both directions, thepixel electrode 245 can be formed of a transparent metal oxide. Thepixel electrode 245 may include at least one material selected fromtransparent conductive oxides such as ITO, IZO, ZnO, and In₂O₃. When theorganic light-emitting display apparatus 200 is a top-emission displayapparatus in which an image is displayed in a direction away from thesubstrate 210, the pixel electrode 245 further includes a reflectiveelectrode formed of a light-reflecting material. Although the pixelelectrode 245 and the electrode 235 are separate elements in FIG. 5,according to an embodiment, the pixel electrode 245 and the electrode235 may be integrally formed with each other.

According to an embodiment, the organic light-emitting display apparatus200 includes a pixel-defining film 250 that defines a light-emittingportion by exposing a part of the pixel electrode 245 on the protectivelayer 240.

According to an embodiment, the organic emission layer 255 is disposedon the part of the pixel electrode 245 exposed by the pixel-definingfilm 250. The organic emission layer 255 is disposed between the pixelelectrode 245 and the counter electrode 260. At least one functionallayer, such as a hole transport layer (HTL), a hole injection layer(HIL), an electron transport layer (HTL), and an electron injectionlayer (EIL), in addition to the organic emission layer 255, may bedisposed on the pixel electrode 245 and may have a single-layerstructure or a multi-layer structure.

According to an embodiment, the counter electrode 260 faces the pixelelectrode 245. The counter electrode 260 can be formed as a commonelectrode by being entirely deposited on the substrate 210. The counterelectrode 260 may be formed by thinly depositing one of Ag, Mg, Al, Pt,Pb, Au, Ni, Nd, Ir, Cr, Li, Ca, lithium fluoride (LiF), and/or acompound thereof. The counter electrode 260 may include a reflectiveelectrode and/or a semi-transparent electrode, based on a light emittingdirection.

According to an embodiment, the organic light-emitting display apparatus200 further includes a capping layer disposed on the counter electrode260 that includes an inorganic material to protect the counter electrode260. The organic light-emitting display apparatus 200 includes anencapsulation substrate 270 that faces the substrate 210 andencapsulates the substrate 210 using an encapsulating member, to preventoxygen and moisture from being externally introduced. Alternatively, theorganic light-emitting display apparatus 200 may include a thin filmencapsulation layer formed by alternately stacking at least one organicfilm and at least one inorganic film, instead of the encapsulationsubstrate 270.

FIG. 6 is a cross-sectional view of an LCD apparatus 300 according to anembodiment.

Referring to FIG. 6, an LCD apparatus 300 includes a substrate 310, anoxide semiconductor pattern 315, a gate insulating film 320, a gateelectrode 325, an interlayer insulating film 330, an electrode 335, aprotective layer 340, a pixel electrode 345, a liquid crystal layer 350,and a counter electrode 355.

The oxide semiconductor pattern 315 is disposed on the substrate 310,includes a semiconducting first oxide semiconductor region 315 a and aconducting second oxide semiconductor region 315 b, and corresponds tothe oxide semiconductor pattern 115 of FIG. 1. The oxide semiconductorpattern 315 may be replaced with the oxide semiconductor pattern 116 ofFIG. 3. The gate insulating film 320 is disposed on the substrate 310 tocover the oxide semiconductor pattern 315, includes a first insulatingregion 320 a with a first thickness da and a second insulating region320 b with a second thickness db less than the first thickness da, andcorresponds to the gate insulating film 120 of FIG. 1.

The gate electrode 325 is disposed on the first insulating region 320 a,has at least a part that overlaps the first oxide semiconductor region315 a, and corresponds to the gate electrode 125 of FIG. 1. Theinterlayer insulating film 330 is disposed on the gate insulating film330 to cover the gate electrode 325 and corresponds to the interlayerinsulating film 130 of FIG. 1. The electrode 335 is disposed on theinterlayer insulating film 330, is electrically connected to the secondoxide semiconductor region 320 b through a contact plug CP thatpenetrates the interlayer insulating film 330 and the gate insulatingfilm 320, and corresponds to the electrode 135 of FIG. 1. The electrode335 includes a source electrode 335 a and a drain electrode 335 b.

The substrate 310, the oxide semiconductor pattern 315, the gateinsulating film 320, the gate electrode 325, the interlayer insulatingfilm 330, and the electrode 335 respectively correspond to the substrate110, the oxide semiconductor pattern 115, the gate insulating film 120,the gate electrode 125, the interlayer insulating film 130, and theelectrode 135 of FIGS. 1 and 3, and thus a repeated explanation thereofwill not be given.

According to an embodiment, the LCD apparatus 300 further includes theprotective layer 340, the pixel electrode 345, the liquid crystal layer350, the counter electrode 355, a planarization layer 360, a colorfilter 365, a black matrix 370, and a counter substrate 380.

According to an embodiment, the protective layer 340 covers theinterlayer insulating film 330 and the electrode 335, and has a via-holeVH through which a part of the electrode 335 is exposed. The protectivelayer 240 can be formed of an organic insulating material using spincoating, etc., and has a flat top surface.

According to an embodiment, the liquid crystal layer 350 is disposedbetween the substrate 310 on which a TFT is formed and the countersubstrate 380 on which the counter electrode 355 and the color filter365 are formed.

According to an embodiment, the black matrix 370, the color filter 365,the planarization layer 360, and the counter electrode 355 aresequentially formed on the counter substrate 380.

According to an embodiment, the black matrix 370 blocks light that isunnecessary to form an image. The black matrix 370 can block lightleakage of light caused by abnormal liquid crystal molecule behaviorsalong a pixel edge or mixed colors along a color filter 365 edge.

According to an embodiment, the color filter 365 imparts color to lightthat propagates through a pixel. The color filter 365 can be one of ared filter, a green filter, and a blue filter.

According to an embodiment, the planarization layer 360 covers the blackmatrix 370 and the color filter 365. The planarization layer 360 can beformed of an organic insulating material using spin coating, etc., andhas a flat top surface.

According to an embodiment, the counter electrode 355 is formed of atransparent conductive material, and may be referred to as a commonelectrode. For example, the counter electrode 355 may be formed of atransparent conductive metal oxide such as ITO, IZO, or ITZO.

According to an embodiment, the pixel electrode 345 receives a pixelsignal from the source electrode 335 a of the TFT and a potentialdifference is formed between the pixel electrode 345 and the counterelectrode 355. Once the potential difference is formed, the molecules ofthe liquid crystal layer 350 rotate due to dielectric anisotropy, whichcontrols the amount of light than can propagate through the liquidcrystal layer 350. Light is incident to the the liquid crystal layer 350from a light source. Thus the amount of light emitted from the liquidcrystal layer 350 can be adjusted by adjusting the potential differencebetween the pixel electrode 345 and the counter electrode 355, therebyenabling light with a desired luminance and a desired color to beemitted.

According to a method of manufacturing the TFT according to one or moreembodiments, since a gate insulating film having thicknesses that differaccording to regions entirely covers an oxide semiconductor pattern,current may be prevented from leaking between a gate and a drain, whichcan reduce the risk of a breakdown of the TFT. Since no mask is added,manufacturing costs can be decreased. Accordingly, the TFT can reliablyoperate with a long lifespan.

While one or more exemplary embodiments have been described withreference to the figures, it will be understood by those of ordinaryskill in the art that various changes in form and details may be madetherein without departing from the spirit and scope as defined by thefollowing claims.

What is claimed is:
 1. A method of manufacturing a thin-film transistor(TFT), the method comprising: forming an oxide semiconductor pattern ona substrate; sequentially stacking an insulating material layer and ametal layer on the substrate that covers the oxide semiconductorpattern; forming a photosensitive pattern on the metal layer; forming agate electrode by wet etching the metal layer using the photosensitivepattern as a mask, wherein a side surface of the gate electrode isdisposed inward from a side surface of the photosensitive pattern, andwherein at least one part of the gate electrode overlaps a first oxidesemiconductor region of the oxide semiconductor pattern; forming a gateinsulating film by partially etching the insulating material layer usingthe photosensitive pattern as a mask, wherein the gate insulating filmincludes a first insulating region with a first thickness under thephotosensitive pattern and a second insulating region with a secondthickness less than the first thickness; and performing plasmaprocessing on the gate insulating film wherein a second oxidesemiconductor region of the oxide semiconductor pattern under the secondinsulating region becomes conductive.
 2. The method of claim 1, whereinthe plasma processing uses a hydrogen-containing gas.
 3. The method ofclaim 1, wherein the second thickness ranges from about 500 Å to about1000 Å.
 4. The method of claim 1, further comprising: removing thephotosensitive pattern; forming an interlayer insulating film on thegate electrode and the gate insulating film; forming a contact holethrough which a part of the second oxide semiconductor region isexposed, by etching the gate insulating film and the interlayerinsulating film; and forming an electrode through the contact hole thatis electrically connected to the exposed part of the second oxidesemiconductor region.
 5. The method of claim 1, wherein forming of gateinsulating film comprises partially dry etching the insulating materiallayer using the photosensitive pattern as a mask, wherein an edge of thephotosensitive pattern corresponds to a boundary between the first andsecond insulating regions.
 6. The method of claim 1, wherein the firstinsulating region comprises a central portion covered by the gateelectrode and an edge portion not covered by the gate electrode.
 7. Themethod of claim 6, wherein performing the plasma processing comprises:removing the photosensitive pattern; and performing plasma processingusing the gate electrode as a mask to form the oxide semiconductorpattern comprising the first oxide semiconductor region under thecentral portion of the first insulating region, a third oxidesemiconductor region under the edge portion of the first insulatingregion, and the conductive second oxide semiconductor region under thesecond insulating region, wherein the third semiconductor region has aresistance less than a resistance of the first oxide semiconductorregion and greater than a resistance of the second oxide semiconductorregion.
 8. A thin-film transistor (TFT) substrate comprising: asubstrate; an oxide semiconductor pattern disposed on the substrate andcomprising a semiconducting first oxide semiconductor region and aconductive second oxide semiconductor region, wherein the oxidesemiconductor pattern comprises a third oxide semiconductor regiondisposed between the first and second oxide semiconductor regions andthat has a resistance less than a resistance of the first oxidesemiconductor region and greater than a resistance of the second oxidesemiconductor region; a gate insulating film disposed on the substratethat covers the oxide semiconductor pattern and that comprises a firstinsulating region with a first thickness and a second insulating regionwith a second thickness less than the first thickness; a gate electrodedisposed on the first insulating region, wherein at least a part of thegate electrode overlaps the first oxide semiconductor region; and aninterlayer insulating film disposed on the gate insulating film thatcovers the gate electrode, wherein the second oxide semiconductor regionbecame conductive from a hydrogen gas based plasma process performed onthe gate electrode and gate insulating film.
 9. The TFT substrate ofclaim 8, further comprising an electrode disposed in the interlayerinsulating film and that is electrically connected to the second oxidesemiconductor region through a contact plug that penetrates theinterlayer insulating film and the gate insulating film.
 10. The TFTsubstrate of claim 8, wherein the second thickness ranges from about 500Å to about 1000 Å.
 11. The TFT substrate of claim 8, wherein the firstinsulating region comprises a central portion covered by the gateelectrode and an edge portion not covered by the gate electrode.
 12. Aflat panel display apparatus comprising: a substrate; an oxidesemiconductor pattern disposed on the substrate and that comprises asemiconducting first oxide semiconductor region and a conductive secondoxide semiconductor region, wherein the oxide semiconductor patterncomprises a third oxide semiconductor region disposed between the firstand second oxide semiconductor regions and that has a resistance lessthan a resistance of the first oxide semiconductor region and greaterthan a resistance of the second oxide semiconductor region; a gateinsulating film disposed on the substrate that covers the oxidesemiconductor pattern and that comprises a first insulating region witha first thickness and a second insulating region with a second thicknessless than the first thickness; a gate electrode disposed on the firstinsulating region, wherein at least a part of the gate electrodeoverlaps the first oxide semiconductor region; an interlayer insulatingfilm disposed on the gate insulating film that covers the gateelectrode; and an electrode disposed in the interlayer insulating filmthat is electrically connected to the second oxide semiconductor regionthrough a contact plug that penetrates the interlayer insulating filmand the gate insulating film.
 13. The flat panel display apparatus ofclaim 12, wherein the second oxide semiconductor region becomesconductive from a hydrogen gas based plasma process performed on thegate electrode and gate insulating film.
 14. The flat panel displayapparatus of claim 12, wherein the second thickness ranges from about500 Å to about 1000 Å.
 15. The flat panel display apparatus of claim 12,wherein the first insulating region comprises a central portion coveredby the gate electrode and an edge portion not covered by the gateelectrode.
 16. The flat panel display apparatus of claim 12, furthercomprising: a pixel electrode electrically connected to the electrode; acounter electrode that faces the pixel electrode; and an organicemission layer disposed between the pixel electrode and the counterelectrode.
 17. The flat panel display apparatus of claim 12, furthercomprising: a pixel electrode electrically connected to the electrode; acounter electrode that faces the pixel electrode; and a liquid crystallayer disposed between the pixel electrode and the counter electrode.